CRITICAL POINT DRIERS

K850WM Large Chamber (MEMS/Wafer) Critical Point Dryer

The K850WM is designed to critical point dry a complete 150mm (6") wafer. The K850WM has built-in heating and water cooling (see: E4860 heater / chiller) and will give temperature control of +5°C cooling and +35°C during heating. This ensures the critical point is accurately obtained, avoiding excess pressures or temperatures, or the need to rely on pressure relief valves to control pressure during the heating cycle. The K850WM has a vertical chamber which allows top loading of specimens. A viewing port is fitted in the top plate for sample observation. The K850WM sample exchange mechanism is simple to use and ensures the sample remains under liquid during loading.

Sample handling

100mm or 150mm diameter wafers are held in a PTFE holding tray. The tray including wafer is immersed in acetone in order to remove all moisture from the sample. After dehydration, the wafer and holder is transferred into the pre-cooled sample chamber using the wafer transfer device. On completion of the critical point drying process, the wafer is removed from the chamber using the transfer device prior to further processing.

Key Features & Benefits

• 170mm diameter chamber - optimised for wafer / MEMS drying
• Vertical chamber with top filling and bottom draining - ensures specimens do not become uncovered during drying
• Thermoelectric heating - accurate temperature control
• Fine control needle valve pressure let down - precise control
• Temperature monitoring and control with thermal cut-out protection
• Pressure monitoring with safety cut out for over pressure

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