K850WM Large Chamber (MEMS/Wafer) Critical
Point Dryer 
The K850WM is
designed to critical point dry a complete 150mm (6") wafer. The
K850WM has built-in heating and water cooling (see: E4860 heater /
chiller) and will give temperature control of +5°C cooling and +35°C
during heating. This ensures the critical point is accurately obtained,
avoiding excess pressures or temperatures, or the need to rely on
pressure relief valves to control pressure during the heating cycle. The
K850WM has a vertical chamber which allows top loading of specimens. A
viewing port is fitted in the top plate for sample observation. The
K850WM sample exchange mechanism is simple to use and ensures the sample
remains under liquid during loading.
Sample
handling
100mm or 150mm
diameter wafers are held in a PTFE holding tray. The tray including
wafer is immersed in acetone in order to remove all moisture from the
sample. After dehydration, the wafer and holder is transferred into the
pre-cooled sample chamber using the wafer transfer device. On completion
of the critical point drying process, the wafer is removed from the
chamber using the transfer device prior to further processing.
Key
Features & Benefits
-
170mm
diameter chamber - optimised for wafer / MEMS drying
-
Vertical
chamber with top filling and bottom draining - ensures specimens do
not become uncovered during drying
-
Thermoelectric
heating - accurate temperature control
-
Fine
control needle valve pressure let down - precise control
-
Temperature
monitoring and control with thermal cut-out protection
-
Pressure
monitoring with safety cut out for over pressure
