SPUTTER COATER: K675X
& K675CD High Resolution Large Chamber Sputter Coater:
Complete 8 inch (200mm)
wafers can be coated in The K675X Sputtering Coater System. The base
system with twin gear rotating sample stage gives a progressive
elliptical rotation for even sputtering desposition.
The K675X Coating System employs a
magnetron target assembly which enhances the efficiency of the
Sputtering process using low voltages, giving a thin and fine grain
coating.
There are three such target assemblies in
the K675X, positioned to give coating over a large diameter which,
together with a rotating sample table, ensures even depositions. This
method allows standard targets to be utilised, and avoids the necessity
of special large profile targets.
The multi-target system is particularly
useful in the semi-conductor wafer industry. It has a turbomolecular
pump backed by a Rotary Vacuum Pump.
The integrated instrument panel and
plug-in electronics maximise 'up-time' and, with user-friendly designs,
ensures satisfactory multi-user discipline.
The sputtering parameters can be pre-set,
including the gas bleed needle valve, which has electromagnetic valve
back-up.
The independent Vacuum Pump is controlled
by the Instrument throughout the fully automatic coating cycle. It can
be used to Sputter Coat targets such as Gold, and also targets that may
need pre-cleaning, or the removal of oxide layers, such as Chromium.
A shutter assembly is fitted as standard,
which allows a Sputter Cleaning and the Sputter Cycle to be carried out
while maintaining the vacuum.
Features:
- Equipped with three sputter targets
- Turbo molecular pumping system
- Fully Automatic Control
- Peltier cooled sputter head
- Fine Coating (Order of 0.5nm Cr Grain
Size)
- Special Rotating Stage with full Tilt
Facility fitted as standard
- Thin Film Deposition (typically 5nm)
- 300mm Diameter Chamber
- Dual sputter head available as an
option
Benefits:
- Allows coating of large samples such
as 8” wafers
- Allows sputtering of fine grain
oxidising metals such as Cr or Ir
- Easy to operate
- No cooling water required
- Ultra high resolution reproducible
coatings
- Fully adaptable to a wide range of
specimens
- Repeatable film thickness depositions
- Easy loading and unloading of samples
such as 8” wafers
Specification
of K675X Sputtering Coater System:
Instrument Case - 450mm
W x 500mm D x 300mm H (Overall height of unit 630mm)
Work Chamber - Borosilicate Glass 300mm Dia. x 200mm H
Safety Shield - Polycarbonate.
Weight - 42Kg
Targets - Three x 54mm Dia. x 0.3mm Thick Chromium
fitted as standard
Rotating Specimen Stage - Adjustable for 6 to 8 inch
Wafers, Height spacing to target 60mm
Vacuum Gauge - Atmos. - 1 x 10-5 mbar
Deposition - 0-450mA
Deposition Rate - 0-15nm/minute
Sputter Timer - 0-4 minutes
Supply - 230 Volts 50Hz (8 Amp Max including pump)
115 Volts 60Hz (16 Amp Max including pump)
Services - Argon -
Nominal 10 psi
Nitrogen - Nominal 10 psi (Argon may be used as common
gas)
Rotary Backing Pump- Two Stage Vacuum Pump No.2,
35L/Min complete with Vacuum Hose and Oil Mist Filter. 2m3/Hr.
