CARBON AND METAL EVAPORATORS: K975X
- K975X High Vacuum Turbo Evaporator
for Multiple Thin Films Applications:
The K975X Turbo Evaporator,
is a multiple application system to enable a range of preparation
techniques to be applied with the flexibility and module expansion
capability to develop new methods and prepare new specimens. It allows for Carbon Evaporation, Metal
Evaporation from both Baskets and Crucibles and a Sputter Coating option.
A range of techniques can be practiced
including carbon support films and replicas for TEM,
Carbon/Metal Evaporation, Low Angle Shadowing and sequential layer
coatings using dual source evaporation and the Sputter Coating option
can be used for a range of target materials.
The system flexibility is further
enhanced by the use of a microcontroller, which readily allows the
Customer access to a range of options, but readily 'defaults' to optimum
operating conditions, allowing both fully automatic and manual override
as required.
The unique Loading Rack out Drawer sample
system gives the user easy sample access with good sample size and the
hinged lid assembly makes any other areas of the system readily
accessible.
The unit has a Turbo Pump, externally
mounted for convenience and easy exchange, and is backed up by a Rotary
Vacuum Pump. The complete pumping sequence is under fully automatic
control, achieving a high vacuum for evaporation.
The Unit is bench mounted, with easy to
use controls, and cannot be damaged by inadvertent use.
Note: The K975s is based
on the K975X, however it has a special load lock door which allows the
entry of 8" wafer for carbon coating, with applications such as FIB
work.
| Features: |
Benefits: |
| Automatic pumping sequence
|
Ease of operation
|
| Samples up to 140mm square or 200mm
diameter
|
Flexible usage
|
| Unique 'anti-stick' carbon rod gun
evaporation assembly
|
Reliable carbon evaporation
|
| Rack out drawer sample loading system
|
Convenient sample loading/unloading
|
| Selectable evaporation supplies giving
x 4 evaporation settings
|
Flexible operation – carbon and
metal evaporation sources
|
| Restricted or full vent control
|
Prevents disturbance of samples
|
| Sputter coating (option) for range of
metal targets
|
Fully flexible system
|
| Film thickness monitor (option) |
Easy to measure level of metal or
carbon deposition |
Specifications
of the K975X High Vacuum Evaporator:
Instrument Case - W
:450mm x D500 x H:300mm
Borosilicate Glass Work Chamber with Hinged Top Plate -
Dia: 250mm x H: 300mm (can accommodate samples to 200 mm) (8") in
Dia.
Safety Polycarbonate Implosion Guard - To suit work
chamber readily removable for maintenance
Weight - 65Kg.
Carbon Gun - Adjustable height with Tilt Control 0-20o.
Uses 6.15mm Carbon Rods
Turbomolecular Pump - 100L/Seconds as Standard Optional
Sizes Available
Vacuum Gauges - Active Gauge Head Atm to 1x10-7
mbar.
Working Vacuum - within 15 minutes
Operating Vacuum - Into x10-5 mbar range
(Liquid Nitrogen Trap Option Available)
Evaporation Supply (Pulsed or Variable Control) - 4 x
Selectable, Low Voltage Volts a.c. V, 5V, 15V,25V @ 25 amps. 7V @100
amps
Specimen Table - With Tilt Facility 0-45o
Rotating Specimen Table Option - 60mm Dia.Tilting 0-45o,
with Variable Speed Control 15rpm To 45rpm
Sputtering Option
Deposition - 0 - 100mA
Deposition Rate - 0-50nm/Minute Gold (Au)
Standard Target - 57 mm Au (options Pt, Pt/Pd, Pd, Ni, Cu, Ag)
Timer - 0 to 4 Minutes
HT Safety Interlocked
Film Thickness Option
Glow Discharge Option
Services - Argon (For
Sputtering option) Nominal 4 psi
Vacuum Pump - No2 Pump (2m3/Hr) pumping speed Oil Mist
Filter, Vacuum Hose. (Included with Instrument)
Electrical supply - 230 Volts - 50/60Hz - 8 amp normal
Including pump. 115 Volts - 50/60Hz - 16 amp normal including Pump
Note: In Circuits with
Current Trips , when using Pulse for 230 v a 16amp minimum for 115 v a
32 amp minimum
