FEDELCO, S.L.
FEDELCO, S.L.
C/ Lago Constanza, 46
28017 Madrid
Tel: 91 408 16 25
Fax: 91 408 16 90
10:00 - 13:30 horas
14:30 - 17:30 horas
de lunes a viernes.
RF PLASMA ETCHING / ASHING
K1050X RF Plasma Etcher / Asher / Cleaner
The K1050X Plasma Treatment Unit consists of a solid state RF generator and associated tuning circuits, dual process gas flow monitoring needle valve control and full or restricted vent control.
It has a cylindrical Chamber with a rack out drawer system for ease of sample loading.
The vacuum system is a Dual stage separate Rotary Vacuum Pump or Optional Turbo Pumped backed by Diaphragm Pump.
The rack out drawer system can be exchanged for a vacuum loading port, for special cleaning applications in SEM/TEM.
This usually employs an Oxygen/Argon mix of gases, the Oxygen removing the organic material (hydrocarbons) and the Argon giving a surface etching of the sample.
Applications
- Asbestos sample preparation
- Microincineration of organic material
- Etching of organic samples for SEM & TEM work
- Removal of Photoresist and electronc component encapsulations Surface treatment of plastics
- Cleaning of SEM/TEM sample holders
Features
- Solid State RF Generator and associated tuning circuits
- Fully Automatic Control
- Rack out drawer
- Dual process gas flow
- Compact bench-top system
Benefits
- Low temperature ashing process
- Easy to operate
- Easy loading/removal of samples
- Can select a mixture of gases
- Space saving
NOTE: We recommend that our No. 2 pump is used with unit as 'special oil' dedicates the application.
Specification of the K1050X Plasma Unit
- Instrument Case: 450mm W x 350mm D x 300mm H.
- Barrel Work Chamber: 'Pyrex' 160mm L x 110mm Dia. (Borosilicate Glass as standard.)
- Rack Out Drawer: Sliding Draw Assembly with Sample Holder Tray.
- Plasma Output: RF Power Supply - Solid state 100 Watts RF Peak, Normal operating Range 25 to 75 Watts @ 13.56mhz. (Note: The frequency used is that allocated by the International Standards CISPR as an allowed 'industrial' frequency.)
- Vacuum Gauge: Active Gauge Head with fully operating vacuum range display (ATM to 1x10-5 mbar. Full scale - normal operating vacuum 0.5mbar to1.0mbar)
- Digital Timer Unit: Displays elapsed time with range select: 99.9Hours. Automatic termination of Ashing Process.
- Dual Gas Flow Gauges: Dual Gas Needle Valve Flow Control, selectable for 1 or 2 or both gasses (calibrated 5 to 100cm3/minute Air @ A.T.P.)
- Weight: 25Kg.
- Supply: 230Volts 50Hz (5 amp max. including. Pump)
- Services: Process Gas at nominal 5 psi, (0.33bar)
- Vacuum Pump: No. 2 Pump (with a synthetic oil 'Fomblin' for Oxygen or Corrosive Process Gases.) 2m3/Hr
Para información adicional de nuestros equipos, accesorios o productos llámenos al 91 408 16 25
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