RF PLASMA ETCHING / ASHING: K1050X RF Plasma
Etcher / Asher / Cleaner
The K1050X Plasma Treatment
Unit consists of a solid state RF generator and associated tuning
circuits, dual process gas flow monitoring needle valve control and full
or restricted vent control.
It has a cylindrical Chamber with a rack
out drawer system for ease of sample loading.
The vacuum system is a Dual stage
separate Rotary Vacuum Pump or Optional Turbo Pumped backed by Diaphragm
Pump.
The rack out drawer system can be
exchanged for a vacuum loading port, for special cleaning applications
in SEM/TEM.
This usually employs an Oxygen/Argon mix
of gases, the Oxygen removing the organic material (hydrocarbons) and
the Argon giving a surface etching of the sample.
Applications:
- Asbestos sample preparation
- Microincineration of organic material
- Etching of organic samples for SEM
& TEM work
- Removal of Photoresist and electronc
component encapsulations
- Surface treatment of plastics
- Cleaning of SEM/TEM sample holders
Features:
- Solid State RF Generator and
associated tuning circuits
- Fully Automatic Control
- Rack out drawer
- Dual process gas flow
- Compact bench-top system
Benefits:
- Low temperature ashing process
- Easy to operate
- Easy loading/removal of samples
- Can select a mixture of gases
- Space saving
NOTE:
We recommend that our No. 2 pump is used with unit as 'special oil'
dedicates the application.
Specification
of the K1050X Plasma Unit:
Instrument Case: 450mm W
x 350mm D x 300mm H.
Barrel Work Chamber: 'Pyrex' 160mm L x 110mm Dia. (Borosilicate
Glass as standard.)
Rack Out Drawer: Sliding Draw Assembly with Sample
Holder Tray.
Plasma Output: RF Power Supply - Solid state 100 Watts
RF Peak, Normal operating Range 25 to 75 Watts @ 13.56mhz.
(Note: The frequency used is that allocated by the International
Standards CISPR as an allowed 'industrial' frequency.)
Vacuum Gauge: Active Gauge Head with fully operating
vacuum range display (ATM to 1x10-5 mbar. Full scale - normal
operating vacuum 0.5mbar to1.0mbar)
Digital Timer Unit: Displays elapsed time with range
select: 99.9Hours. Automatic termination of Ashing Process.
Dual Gas Flow Gauges: Dual Gas Needle Valve Flow
Control, selectable for 1 or 2 or both gasses (calibrated 5 to 100cm3/minute
Air @ A.T.P.)
Weight: 25Kg.
Supply: 230Volts 50Hz (5 amp max. including. Pump) 115
Volts 60Hz (10 amp max. including Pump)
Services: Process Gas at nominal 5 psi, (0.33bar)
Vacuum Pump: No. 2 Pump (with a synthetic oil 'Fomblin'
for Oxygen or Corrosive Process Gases.) 2m3/Hr
