EQUIPOS DE PREPARACIÓN DE MUESTRAS: Sputter
Coaters
FEDELCO,
S.L.
SPUTTER
COATERS:
When
a target is bombarded with fast heavy particles, erosion of the target
material occurs, this is termed sputtering. The arrangements of the
systems are such that some of the sputtered atoms will condense on the
surface of the specimen to be coated. The above process occurring in the
conditions of a gaseous glow discharge between an anode and cathode is
termed sputtering and can be enhanced by the choice of a suitable gas
and target material, which together with other developments of the
technique, allows the deposition of a suitable coating to increase the
electrical conductivity of a specimen, probably the single most common
requirement for Scanning Electron Microscopy.
The development of Sputter Coater systems embodies significant empirical
design, however, an understanding in classical terms of glow discharge
characteristics enhance such designs, and may assist in the comparison
of differing systems.
